| 摘要 |
PROBLEM TO BE SOLVED: To provide a panel transfer device capable of simplifying the entire device even when a tilt mechanism is provided thereon, eliminating any structural dead point of a link mechanism even at any position in the panel transfer motion, and enhancing the controllability. SOLUTION: The panel transfer has a tilt mechanism 18 to tilt a panel holding unit 15. The tilt mechanism 18 comprises a rotary actuator mounted on a first slide block 4 or a second slide block 5, and a transmission mechanism to tilt the panel holding unit 15 by transmitting the rotational drive of the rotary actuator. COPYRIGHT: (C)2005,JPO&NCIPI
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