发明名称 MEMS micro-mirror assembly
摘要 A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).
申请公布号 US9405116(B2) 申请公布日期 2016.08.02
申请号 US201314382724 申请日期 2013.02.11
申请人 INTEL CORPORATION 发明人 Khechana Faouzi;Abele Nicolas
分类号 G02B26/08;B81C3/00;H05K1/18;H05K3/32;B81C1/00;G02B7/182;G02B26/10;H05K1/11 主分类号 G02B26/08
代理机构 代理人
主权项 1. A MEMS micro-mirror assembly comprising; a MEMS device, which comprises a MEMS die and a magnet; a flexible PCB board to which the MEMS device is mechanically, and electrically, connected; wherein the flexible PCB board further comprises a first extension portion, which is defined by a portion of the flexible PCB board, which comprises a least one electrical contact, which is useable to electrically connect the MEMS micro-mirror assembly to another electrical component, wherein the MEMS device is mounted on the flexible PCB board.
地址 Santa Clara CA US