发明名称 |
MEMS micro-mirror assembly |
摘要 |
A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400). |
申请公布号 |
US9405116(B2) |
申请公布日期 |
2016.08.02 |
申请号 |
US201314382724 |
申请日期 |
2013.02.11 |
申请人 |
INTEL CORPORATION |
发明人 |
Khechana Faouzi;Abele Nicolas |
分类号 |
G02B26/08;B81C3/00;H05K1/18;H05K3/32;B81C1/00;G02B7/182;G02B26/10;H05K1/11 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
1. A MEMS micro-mirror assembly comprising;
a MEMS device, which comprises a MEMS die and a magnet; a flexible PCB board to which the MEMS device is mechanically, and electrically, connected; wherein the flexible PCB board further comprises a first extension portion, which is defined by a portion of the flexible PCB board, which comprises a least one electrical contact, which is useable to electrically connect the MEMS micro-mirror assembly to another electrical component, wherein the MEMS device is mounted on the flexible PCB board. |
地址 |
Santa Clara CA US |