| 发明名称 |
Fabrication method for micromechanical element. |
| 摘要 |
<p>Process for the manufacture of at least one structural component (14) of elongate general shape on a substrate (12) made of a first material and having a substantially planar upper face (14), the said component (14), made of a second material, comprising at least one first wing (14a) parallel to a plane perpendicular to the said upper face (13). <IMAGE></p> |
| 申请公布号 |
EP0596455(A1) |
申请公布日期 |
1994.05.11 |
| 申请号 |
EP19930117739 |
申请日期 |
1993.11.02 |
| 申请人 |
CSEM, CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A. |
发明人 |
MORET, JEAN-MARC |
| 分类号 |
H01L21/302;B81B3/00;C23C16/01;H01H1/00;H01L21/3065;(IPC1-7):C23C16/00 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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