| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide materials for a multilayer protective film which provides protection against oxidation without deteriorating its reflectance. <P>SOLUTION: In the reflective multilayer film which is formed by alternatively accumulating materials having relatively high reflectance and low reflectance at the wavelength of incident light, each protective film is made of (a) a single element of Zr, Nb, Y, La, Rh, Ti, or B, (b) a material containing at least one of Zr, Nb, Y, La, Rh, Ti, Si, or Mo as a main component, or (c) a material containing Si and B as main components. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
