| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measurement device and a surface shape measurement method with which it is possible to measure the surface shape (three-dimensional shape) of a surface to be measured with high sensitivity and with high accuracy even when reflective indices are not uniform as in the case where the surface to be measured of a measurement object has a complex shape.SOLUTION: A surface shape measurement device 1 acquires each of at least a first interference image whose luminous energy is relatively large and a second interference image whose luminous energy is relatively small from an image-capturing unit 16 by controlling the operation of a light source unit 12, finds a plurality of interferograms for each point of the surface to be measured on the basis of each of the first interference image and the second interference image, selects an interferogram within a preset measurement range for each point from the plurality of interferograms, and detects the position in the optical axial direction of each point on the surface to be measured on the basis of the selected interferogram for each point.SELECTED DRAWING: Figure 1 |
