| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam-sorting device having a new configuration. SOLUTION: The beam-sorting device comprises a first deflector which can take, by external control, any one of among a state for deflecting beam in a first direction within a virtual plane, a state for deflecting the beam in a second direction, and a state for straightly propagating the beam; a second deflector which is disposed on the optical path of the beam straightly propagating in the first deflector and can assume either a state for deflecting the beam, in a third direction within the virtual plane or a state for deflecting the beam in a fourth direction; and a control device which controls the first deflector so that the beam incident on the first deflector straightly propagates or goes out, while being deflected in the first or second direction, and controls the second deflector so that the beam incident on the second deflector goes out, while being deflected in the third or fourth direction. With the outgoing direction of the beam propagating straight in the first deflector, the first and second directions are inclined in the same direction, the third and fourth directions are inclined in the same direction, and the first and third directions are inclined in the opposite directions. COPYRIGHT: (C)2009,JPO&INPIT
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