| 摘要 |
PROBLEM TO BE SOLVED: To prevent a junction layer from peeling off.SOLUTION: A control method in one embodiment executes a first process on an object to be processed by controlling a base at a first temperature and controlling, at a second temperature, the temperature of an electrostatic chuck having a built-in heater and disposed on the placement stand of the base and in which the object to be processed is placed. The control method in one embodiment executes a second process on the object to be processed by controlling the base at a third temperature and controlling the temperature of the electrostatic chuck at a fourth temperature by the heater. Furthermore, the control method in one embodiment results in that a temperature difference between the first and the second temperatures and a temperature difference between the third and the fourth temperatures is a permissible temperature for a junction layer by which the base and the electrostatic chuck are joined. |
