| 摘要 |
PROBLEM TO BE SOLVED: To expand a wavelength scanning range in a monochromator using a crank and rocker voice coil type linear motor characterized by high-speed scanning as a driving source. SOLUTION: In this monochromator, a plurality of diffraction gratings 1, 2 having different wavelength ranges are provided, and the diffraction gratings can be used by being switched by a diffraction grating switching mechanism 8 using a stepping motor or the like. The diffraction grating switching mechanism 8 installed on a support member 4 rotating around the axis 3 by being driven by the linear motor 9 rotates a holding mechanism 5 supporting the two diffraction gratings 1, 2 by 180 deg., to thereby switch the diffraction grating. Hereby, a wide wavelength range can be covered without being restricted in the wavelength range of one diffraction grating.
|
