| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a TAB tape capable of stably securing the accurate lead width and shape reproducibility of the distal end of an inner lead. SOLUTION: In parallel with the pattern work of a flying lead 1 by wet etching, an inner side dummy pattern 14 roughly crossing a device part 9 laterally and longitudinally is formed with an interval with the distal end of the flying lead 1 so as not to be continued to the distal end (by a wet etching process using inner side dummy pattern resist 7) inside an area more on the inner side than the column of the distal end of the flying lead 1, and the inner side dummy pattern 14 is removed after the pattern work of the flying lead 1 is ended. COPYRIGHT: (C)2008,JPO&INPIT
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