| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater which is excellent in uniformity of temperature distribution and stability of cleanliness and easily deals with change of at least a width direction size of each heated object.SOLUTION: A heater 100 includes: electric heaters 11 serving as heating means and provided at heating wall bodies 10L, 10R which are disposed facing each other and spaced away from each other; heat radiation members 12 which are disposed in a facing area of the heating wall bodies 10L, 10R so as to be spaced away from each other in a vertical direction and form a shelf-like shape; storage spaces 14, each of which is used to store a heating object 13 and provided between the heat radiation members 12 located adjacent to each other in the vertical direction; and holding means 30 which may hold the heated objects 13 stored in the storage spaces 14 in a substantially horizontal posture and change holding ranges of the heated objects 13. The holding means 30 has an expansion/contraction mechanism 40 which may change a distance between support bar materials 17L, 17R. The expansion/contraction mechanism 40 has a moving mechanism 50 which increases or decreases a space between support pillars 15L, 15R etc.SELECTED DRAWING: Figure 1 |
