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发明名称
ADJUVANT FOR CHEMICAL MECHANICAL POLISHING SLURRY
摘要
申请公布号
EP1844122(A1)
申请公布日期
2007.10.17
申请号
EP20050822495
申请日期
2005.12.28
申请人
LG CHEM, LTD.
发明人
YI, GI-RA;KIM, JONG-PIL;LEE, JUNG-HEE;HONG, JEONG-JIN;HONG, YOUNG-JUN;KIM, NO-MA;LEE, AN-NA
分类号
C09K3/14;H01L21/3105;H01L21/311;H01L21/321
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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