EINRICHTUNG ZUR ROENTGENBESTRAHLUNG VON OBJEKTEN

摘要

The invention relates to a device for irradiating layers of bides with X-rays in which a target (2) switched as an anode acts as the X-ray source and which has a detector (6) to measure the reduction in the intensity of the X-ray beam after penetrating the object (1). In order to be able to display spatial object structures with a high degree of precision, the electron beam (3) aimed at the target is adjustable to shift the target focus (4) especially by steps. Here the distance through which the focus is shifted on the target is such that the shift in the X-ray beam on the detector thus produced is smaller than the area of a detector element (13).