| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining monitoring system capable of enhancing the machining efficiency and the machining accuracy. <P>SOLUTION: The laser machining monitoring system comprises an Nd-YAG laser 30, a chamber 44 to fill gas therein, an induced current detection circuit 58 to detect the induced current by generated gas plasma 48, a monochromator 57 to acquire the time characteristic of plasma emission, an OMA system 41 to detect the continuous spectrum and the line spectrum from gas plasma, a three-dimensional stage 51 to move a target 46 in a three-dimensional direction, a diode laser 45 to irradiate the surface of the target 46, and a system control device 60 to control the three-dimensional stage 51 and the Nd-YAG laser 30 on the basis of the signals of the induced current detection circuit 58, the monochromator 57, and the OMA system 41. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
