| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive oxide thin film higher in light transmittance and conductivity.SOLUTION: The sputtering target including ZnO of 65-88 mol%, GaOof 10-25 mol% and at least one kind of oxides selected from MgO, CaO and BaO has a structure which particles using GaOas a principal component and particles using at least one kind of oxides selected from MgO, CaO and BaO as a principal component are dispersed in a matrix using ZnO as a principal component. The total content of MgO, CaO and BaO is 1-17 mol %, and both of the particles using GaOas a principal component and the particles using the at least one kind of oxides selected from MgO, CaO and BaO as a principal component have an average particle size of 1.5-10 μm.SELECTED DRAWING: Figure 1 |
