摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface conductive electron emitting element enabling a batch processed area to be enlarged with a laser output kept on an existing level thereof, by making it possible to remove an applied conductive thin film material by a lower value of energy than usual when it is removed by a patterning method using excimer laser. SOLUTION: In this surface conductive electron emitting element, at least one pair of electrodes 2 are formed on an insulating substrate 1, a conductive thin film 3 is formed around the electrodes, and an electron emitting film is formed between a pair of the electrodes by removing unnecessary parts of the conductive thin film using a laser. A high-absorption thin film easily absorbing laser is interposed between the conductive thin film and the substrate. The conductive thin film 3 is of PDO or Ni, and the laser high-absorption thin film is of any of acrylic, polycarbonate, polyimide, polyester, epoxy, polysulfone, and polyuretane.</p> |