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经营范围
发明名称
6 mirror microlithography projection system
摘要
申请公布号
EP1178356(B1)
申请公布日期
2004.09.22
申请号
EP20010116916
申请日期
2001.07.11
申请人
CARL ZEISS SMT AG
发明人
MANN, HANS-JUERGEN, DR.;DINGER, UDO, DR.;MUEHLBEYER, MICHAEL
分类号
G02B17/06;G03F7/20;(IPC1-7):G03F7/20
主分类号
G02B17/06
代理机构
代理人
主权项
地址
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