| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic substrate satisfactory for all properties such as dimensional accuracy, flatness, thermal conductivity, and chemical resistance, thereby solving a problem that these properties have not been provided by conventional high-temperature-fired ceramic substrates or low-temperature-fired ceramic substrates. <P>SOLUTION: The present invention provides a multilayer ceramic substrate comprising a plurality of ceramic substrates which are laminated, wherein at least one of the ceramic substrates forming opposite surface layers is composed of a material having a lower firing temperature than that of the other ceramic substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
