| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel manufacturing apparatus for manufacturing particles by using plasma.SOLUTION: A coat particle manufacturing apparatus is constituted of a reaction chamber having a plasma generating region and a cooling region connected to the plasma generating region, a plasma generating element for generating a plasma flame in the plasma generating region, a particle source supply element for supplying a particle source to the plasma generating region, and a coat source supply element for supplying gaseous coat source from the cooling region toward the plasma generating region.SELECTED DRAWING: Figure 1 |
