GRAPHITE MEMBER COATED WITH SILICON CARBIDE

摘要

PROBLEM TO BE SOLVED: To provide a graphite member coated with silicon carbide, which has high stability to gaseous SiO even in the case that the film thickness of the silicon carbide coating is thin and which can be preferably used, e.g. as various members of the apparatus for pulling up silicon single crystal by a CZ-method. SOLUTION: The graphite member is obtained by coating with a silicon carbide coating on the surface of a graphite base material, and the thickness of the silicon carbide coating is 30 to 50μm. A mixed layer of graphite and SiC having thicknesses of 10 to 100μm exists from the interface between the surface of the graphite base material and the SiC coating to the inside of the graphite base material, and the peel strength is not less than 5 MPa. The SiC coating is applied by the CVD method and the graphite member coated with silicon carbide is preferably used as the members of the apparatus for pulling up silicon single crystal.