TEMPERATURE CONTROL SYSTEM OF SEMICONDUCTOR COATING DEVICE

摘要

A temperature control system of a semiconductor coating device comprises a heating plate (15). The heating plate (15) is of an integrated structure. A medium pipe (4) is disposed in the heating plate (15), and the medium pipe (4) is arranged in the heating plate (15) in a casting manner, or a corresponding groove (11) is produced by means of mechanical processing and then the media pipe (4) is welded in the heating plate (15). A heat conductive medium circulation structure is further provided, and an air intake passage (6) is disposed in the middle of the heating plate (15).