发明名称 |
Arrangement of beam shaper and beam deflector, beam deflecting method, ion implantation method, and ion implantation system |
摘要 |
The present invention provides for a beam deflecting method, beam deflector, ion implantation method, and ion implantation system in which a beam deflector for scanning performs deflection of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.
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申请公布号 |
EP1670027(A2) |
申请公布日期 |
2006.06.14 |
申请号 |
EP20050253337 |
申请日期 |
2005.05.31 |
申请人 |
SUMITOMO EATON NOVA CORPORATION |
发明人 |
MATSUSHITA, HIROSHI;KABASAWA, MITSUAKI;AMANO, YOSHITAKA;KIMURA, YASUHIKO;TSUKIHARA, MITSUKUNI;MURAKAMI, JUNICHI |
分类号 |
H01J37/147;H01J37/317 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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