METHOD OF MANUFACTURING MOLD FOR MOLDING STRUCTURE HAVING NANOSTRUCTURE AND MICROSTRUCTURE, AND METHOD OF MANUFACTURING STRUCTURE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a simple method for manufacturing a metallic mold for molding a structure having a nanostructure and a microstructure. SOLUTION: The method of manufacturing the mold comprises steps of (a) transferring a reversal structure of the nanostructure to a photo-hardenable resin film by pushing a light-transmitting original plate which has a mask having a plane pattern of the nanostructure and the microstructure on a face to be pushed to the film in a state that the film is softened by heating, (b) exposing the obtained film to light from above the original plate through the mask, (c) releasing the obtained hardened film from the original plate, (d) forming the reversal structure of the microstructure on the film by developing the released film to remove an unexposed part, (e) preparing a replica having the nanostructure and the microstructure formed on the surface thereof using the obtained film; and (f) preparing the mold having the reversal structure of the nanostructure and the microstructure formed on the surface thereof by depositing a metallic material on the replica. COPYRIGHT: (C)2008,JPO&INPIT