| 摘要 |
<p>A vibration sensor and a manufacturing method thereof are provided to improve a temperature sensitivity of the vibration sensor by alleviating a stress due to a difference in heat expansion coefficients of a tuning fork vibrator and a mounting part. A vibration sensor includes a tuning fork vibrator(10), a mounting part(20), and a support part(40). The tuning fork vibrator includes a base part and plural arm parts, which are elongated from the base portion. The tuning fork vibrator is mounted on the mounting part. The support part includes a narrow part and mounts the tuning fork vibrator on the mounting part. The support part includes plural laminated bumps. The support part electrically couples the tuning fork vibrator with the mounting part. The support part is arranged on a node line which is projected from a node of the tuning fork vibrator to a mounting surface.</p> |
