FREE ABRASIVE GRAIN PROCESSING POLISHING TOOL, MANUFACTURING METHOD FOR THE TOOL, AND FREE ABRASIVE GRAIN POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a polishing tool for finishing the surface of a work-piece, while retaining the high flatness and parallelism of the surface of a workpiece, without degrading the form accuracy, into a mirror surface of a surface-roughness at or lower than several Angstroms, and for satisfying the requirement for a micro crack-free or the like.SOLUTION: In a free abrasive grain processing, a polishing tool 1 for forming the polished face of a polishing surface is formed on the front and back double sides 5a and 5b of a flat sheet glass 5 with a polishing face structure 6 having frosted glass irregularities. In this polishing face structure 6, a polishing face 20 satin-polished to a predetermined surface roughness is scattered with storage pockets 21 of a size capable of accommodating a plurality of abrasive grains AG in a polishing slurry in a discrete point shape.SELECTED DRAWING: Figure 4