| 摘要 |
<p>A processing apparatus and a device manufacturing method are provided to transcribe a pattern imprinted on a mold to a target material by pressing the mold onto a resin which is coated on the target material. A processing apparatus(1) includes a driver(102,105) and a controller(50). The driver transports a mold and a target material relatively. If a first state is a situation when a mold pressed on a resin is transported to a separating direction of the mold from the resin, and if a second state is the situation when the transported mold is separated from the resin, the controller controls the driver, so that a load change rate of the first state is smaller than the second state.</p> |
