发明名称 SMALL ELECTRODE FOR PHASE CHANGE MEMORIES
摘要 A method of manufacturing a memory cell is disclosed. In one embodiment, the method includes forming an electrode including an outer surface that is substantially circular and an exposed surface that has a sublithographic dimension in a direction parallel to the exposed surface. Further, the method may also include forming a layer of phase change material coupled to the exposed surface of the electrode. Various semiconductor devices and additional methods of manufacturing memory cells are also provided.
申请公布号 US2008048171(A1) 申请公布日期 2008.02.28
申请号 US20070861202 申请日期 2007.09.25
申请人 MICRON TECHNOLOGY, INC. 发明人 ZAHORIK RUSSELL C.
分类号 H01L45/00;H01L21/44;H01L21/4763;H01L21/768;H01L47/00 主分类号 H01L45/00
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