发明名称 |
METHOD OF ETCH PROXIMITY CORRECTION, METHOD OF CREATING PHOTOMASK LAYOUT USING THE SAME, COMPUTER READABLE MEDIA INCLUDING A SEQUENCE OF PROGRAMMED INSTRUCTIONS STORED THEREON FOR IMPLEMENTING THE SAME AND MASK IMAGING SYSTEM |
摘要 |
<p>A method of performing etch proximity correction, taking into account an orientation-dependent component, includes providing a layout, selecting a target point on an edge of the layout, defining a proximity range from the target point, defining a probability function including a distance-dependent component, an orientation-dependent component, or both a distance-dependent component and an orientation-dependent component with respect to the proximity range, and calculating a surface integral of the probability function over the proximity range.</p> |
申请公布号 |
KR20110102688(A) |
申请公布日期 |
2011.09.19 |
申请号 |
KR20100021837 |
申请日期 |
2010.03.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIM, SEONG BO;KIM, SANG WOOK;SUH, CHUN SUK;CHOI, SEONG WOON;LEE, SUNG WOO |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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