| 发明名称 |
IMAGE SENSORS AND METHODS OF FORMING THE SAME |
| 摘要 |
An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion. |
| 申请公布号 |
US2016204143(A1) |
申请公布日期 |
2016.07.14 |
| 申请号 |
US201614994230 |
申请日期 |
2016.01.13 |
| 申请人 |
LEE Yun Ki;JUNG Minwook |
发明人 |
LEE Yun Ki;JUNG Minwook |
| 分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An image sensor comprising:
a substrate including a plurality of pixel regions, the substrate having a trench between the pixel regions; a photoelectric conversion part in each of the pixel regions; and a device isolation patterning the trench, the device isolation pattern defining an air gap and having an intermediate portion and an upper portion, the upper portion being narrower than the intermediate portion. |
| 地址 |
Seoul KR |
