| 摘要 |
PROBLEM TO BE SOLVED: To provide a double-sided adhesive sheet for processing a plate member which allows an easy release of an adhered object from the plate-like member and prevents the plate-like member from getting loose or peeling from the adhered object even at an elevated temperature. SOLUTION: The double-sided adhesive sheet 1 for processing a plate-like member includes a base material 2, a first adhesive layer 3 being laminated on one surface of the base material 2 and being adhered to a rigid support plate 6, and a second adhesive layer 4 which is laminated on the other side of the base material 2 and being adhered to a semiconductor wafer 7. The first adhesive layer 3 contains a silicone compound having percent weight loss by thermogravimetry (TG) of≤20% at 150°C. COPYRIGHT: (C)2009,JPO&INPIT
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