PRESSURE SENSOR

摘要

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

主权项

1. A pressure sensor which detects variation in pressures, comprising:
a hollow sensor main body which includes a cavity formed inside the sensor main body and a communication opening which allows the cavity and the outside of the sensor main body to communicate with each other; and a cantilever which is disposed so as to close the communication opening in a cantilever state in which a distal end portion of the cantilever is a free end and a proximal end portion thereof is supported by the sensor main body, and which is bent according to a pressure difference between the cavity and the outside of the sensor main body, wherein a gap which configures a portion of the communication opening is formed on the proximal end portion, wherein the proximal end portion is partitioned into a plurality of branch portions by the gap in a second direction orthogonal to a first direction in which the proximal end portion and the distal end portion are connected to each other in plan view, wherein at least any one of the plurality of branch portions includes a displacement detection portion which detects displacement according to the bending of the cantilever on the basis of a change in a resistance value corresponding to the displacement, and wherein a length of the displacement detection portion along the second direction is shorter than a length of the branch portion along the second direction.