| 发明名称 |
PUMP APPARATUS FOR SEMICONDUCTOR PROCESSING |
| 摘要 |
<p>The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.</p> |
| 申请公布号 |
WO2007044260(A2) |
申请公布日期 |
2007.04.19 |
| 申请号 |
WO2006US38197 |
申请日期 |
2006.09.28 |
| 申请人 |
THE BOC GROUP, INC.;HUNTLEY, GRAEME |
发明人 |
HUNTLEY, GRAEME |
| 分类号 |
F04D29/04 |
主分类号 |
F04D29/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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