MANUFACTURING APPARATUS OF LIGHT RECEIVER, AND MANUFACTURING METHOD OF SUBSTRATE HOLDER AND LIGHT RECEIVER

摘要

PROBLEM TO BE SOLVED: To suppress the temperature un uniformity in a substrate in case of forming a deposited film. SOLUTION: Gas pipes 208 for introducing the raw material gas and substrate holders 203 with a cylindrical base 202 for forming the deposited film are arranged on the circumference around an electrode 205 at equal intervals inside a reaction container 201 of a vacuum airtight structure. A plurality of apertures 102 piercing to an outer surface from a cavity formed inside are formed in the base holders 203. The base holders 203 are fixed to a rotary shaft 204 driven by a rotary mechanism 211 comprising a motor and a gear. The rotary shaft 204 has a temperature controlling gas introducing passage 210 for introducing the gas for controlling the temperature inside the reaction container 201 into the reaction container 201 inside thereof. A high frequency power source 307 is connected to the electrode 205 via a matching box 206.