| 摘要 |
The module (4) has a flow channel (17) connecting an inlet (7) with an outlet (10). A delivery chamber is moved in course of a delivery movement between the inlet and the outlet. Actuators are accommodated by a housing (14). The actuators lying opposite to each other on both sides of the flow channel form actuation stages (A1-A6). The actuation stages are arranged one after another in a flow direction. An elastic membrane (18) abuts a respective circumferential section of the flow channel upon activation of the actuators of the respective actuation stages. Independent claims are also included for the following: (1) a positive displacement pump (2) a method for producing low or high vacuum in a recipient. |
