| 发明名称 |
Method of manufacturing a process chamber component having yttrium-aluminum coating |
| 摘要 |
A method of manufacturing a substrate processing chamber component comprises forming a chamber component comprising a metal alloy comprising yttrium and aluminum, and anodizing an exposed surface of the metal alloy.
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| 申请公布号 |
US8110086(B2) |
申请公布日期 |
2012.02.07 |
| 申请号 |
US20070982039 |
申请日期 |
2007.10.31 |
| 申请人 |
HAN NIANCI;XU LI;SHIH HONG;APPLIED MATERIALS, INC. |
发明人 |
HAN NIANCI;XU LI;SHIH HONG |
| 分类号 |
C25D11/04;C23C16/44;H01J37/32 |
主分类号 |
C25D11/04 |
| 代理机构 |
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