A VACUUM SENSOR USING GRAPHENE AND A VACUUM GAUGE USING THE SAME

摘要

The present invention relates to a vacuum level sensor and a vacuum gauge using graphene, and provides a vacuum level sensor and a vacuum gauge using graphene; comprising a graphene thin film of which an interlayer spacing (d_002) calculated from an X-ray diffraction measurement is in a range between 0.335-10 nm. The vacuum level sensor and the vacuum gauge using graphene have an advantage of measuring a precise vacuum level as a variation of an electric resistance value is greater with the sensor and the gauge having a simple and small size.