| 摘要 |
A force compensating apparatus is for use in a wafer-handling machine. The wafer-handling machine includes a rotatable rim (40) adapted to be concentric with and external to a wafer (10) and a plurality of wafer-supporting fingers (14a, 14b, 14c) disposed about the rim. Each finger is supported by a floating arm (26), part of a support mechanism (20) utilizing first and second fixed arms (22, 24) bracketing the floating arm where the fixed arm attach the support to the rim. Each finger is generally positioned in a radial plane with the rim. The force compensating apparatus (80) comprises a fulcrum mechanism (50) on each fixed arm (22, 24), a first force receiving mass (94) suspended on a rod (92) projecting from the fulcrum in a direction away from the floating arm, a second force receiving mass (98) suspended on a rod (96) projecting from the fulcrum in a radial direction and a force transferring mass (100) suspended on a rod (102) projecting from the fulcrum in a direction toward the floating arm. The fulcrum, first force receiving mass and force transmitting mass form a balance with the force transmitting device contacting the floating arm. The second force receiving mass and the force transmitting mass form a rigid triangle. The action of the balance transfers a force to the floating arm to balance the centrifugal force to the floating arm to balance the acceleration and deceleration forces on the finger.
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