| 摘要 |
PROBLEM TO BE SOLVED: To improve test accuracy. SOLUTION: A probe unit 2 is disposed at the one face side of a circuit board 11 and a probe unit 3 is disposed at the other face side of the circuit board 11. Among probes 2a-2j of the probe unit 2, the corresponding two are contacted to contact points TP1-TP5 defined on wiring patterns 21-24, and among probes 3a-3j of the probe unit 3, the corresponding two are contacted to contact points TP6-TP10 defined on wiring patterns 25-27. Using the probes 2a, 3a, a measuring current I1 is supplied to a group of via holes 31-33 while a cancellation current 12 is supplied to a group of via holes 34-36. The via holes 31-33 group are tested by measuring the resistance of the via holes 31-33 group by the 4 terminal method based on the voltage V1 between the contact points TP1 and TP6 measured using the probe 2b, 3b and the measuring current I1. COPYRIGHT: (C)2009,JPO&INPIT
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