PLASMA SUPPLY DEVICE

摘要

A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The at least one output network includes at least one inductance that has at least one magnetic field strengthening element that includes at least two U-shaped bodies that have substantially identical U-shaped cross-sections and have different lengths to thereby adjust the inductivity of the inductance.