发明名称 Thermal diagnostic for single-crystal process fluid pressure sensor
摘要 A method (150) of verifying a condition of a single-crystal pressure sensor (100) is provided. The method (150) includes providing a single-crystal pressure sensor (100) that has at least one electrical characteristic that varies with applied pressure being coupled to a first output and a second output. The pressure sensor (100) also has at least one resistive element therein. A current is applied through the resistive element (122) to heat (152) the pressure sensor (100). At least one output of the pressure sensor (100) is monitored (154) to determine a response of the pressure sensor (100) to current-induced heat. A verification output is provided (156) based on the response.
申请公布号 AU2013300083(B2) 申请公布日期 2016.12.15
申请号 AU20130300083 申请日期 2013.06.21
申请人 Rosemount, Inc. 发明人 Hedtke, Robert C.
分类号 G01L27/00 主分类号 G01L27/00
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