Charged particle beam system

摘要

A charged particle beam system capable of suppressing drift of a functional component used in association with a sample is offered. The charged particle beam system (1000) images the sample (S) by irradiating the sample with a charged particle beam (EB). The system includes the functional component (such as a sample holder (20)), drive portions (40, 50) for moving the sample holder (20), and a controller (60) for controlling the drive portions (40, 50). The controller (60) controls the drive portions (40, 50) to vibrate the sample holder (20) such that its amplitude is driven to decrease with time.

主权项

1. A charged particle beam system for irradiating a sample with a charged particle beam and imaging the sample for observation thereof, said charged particle beam system having a sample positioning system comprising:
a movable and vibratable functional component used in association with the sample positioning system; a mechanical drive for moving the functional component; and a controller for controlling the mechanical drive, wherein when the sample has reached a desired position the controller controls the mechanical drive to drive the functional component in reciprocal directions such that its amplitude in each direction is driven to decrease with time.