发明名称 PROBE UNIT AND METHOD FOR MANUFACTURING PROBE UNIT
摘要 PROBLEM TO BE SOLVED: To realize reduction in weight.SOLUTION: A probe unit comprises a probe pin 2 and a support part 3 that supports the probe pin 2. The support part 3 is provided with belt-like arms 11, 12 disposed separately from and facing each other, a holding part 13 for holding base end parts (21a, 22a) of the respective arms 11, 12, and the probe pin 2 functioning as a coupling part for coupling tip parts (21b, 22b) of the respective arms 11, 12, thus constituting a quadric link mechanism that tolerates the linear motion or approximately linear motion of the probe pin 2. Each of the arms 11, 12 is constructed so that: ribs (R1, R2) are formed in intermediate portions (21c, 22c), respectively, between first portions (P1a, P1b) closer to the tip end side than to the base end parts and second portions (P2a, P2b) closer to the tip end side than to the first portions; the intermediate portions function as links constituting the quadric link mechanism; and each of the first portions and second portions functions as a joint constituting the quadric link mechanism.SELECTED DRAWING: Figure 3
申请公布号 JP2016205912(A) 申请公布日期 2016.12.08
申请号 JP20150085657 申请日期 2015.04.20
申请人 HIOKI EE CORP 发明人 KOBAYASHI MASASHI
分类号 G01R1/06;G01R1/073;H01L21/66 主分类号 G01R1/06
代理机构 代理人
主权项
地址