| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of improving both of initial displacement amount and dulability. <P>SOLUTION: The piezoelectric element 100 includes a substrate 1; a lower electrode 4 formed above the substrate; piezoelectric layer 6 formed above the lower electrode and consisting of a perovskite oxide represented by the formula of ABO<SB>3</SB>, wherein A contains Pb and B contains Zr and Ti; and an upper electrode 7 formed above the piezoelectric layer. The piezoelectric layer comprises at least two regions 61, 62 where Zr and Zr composition for Ti are different. <P>COPYRIGHT: (C)2008,JPO&INPIT |
