发明名称 |
ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF, DISPLAY PANEL AND MASK PLATE |
摘要 |
Provided are a manufacturing method of an array substrate, an array substrate manufactured thereby, a display panel comprising the array substrate and a mask plate. The manufacturing method of the array substrate comprises: providing a mask plate (10) comprising a transparent substrate (101), a semi-transparent region (102) formed on the transparent substrate (101), an opaque region (103) formed on the semi-transparent region (102), and a fully transparent region (104) excluding the semi-transparent region (102) and the opaque region (103); using the opaque region (103) of the mask plate (10) to form a first mask pattern (5001) on a base substrate (501); and using the semi-transparent region (102)and the opaque region (103) of the mask plate (10) to form a second mask pattern (5002) on the base substrate (501) with the first mask pattern (5001) formed thereon. |
申请公布号 |
WO2016183968(A1) |
申请公布日期 |
2016.11.24 |
申请号 |
WO2015CN89363 |
申请日期 |
2015.09.10 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. |
发明人 |
ZHANG, Zhichao;KUO, Tsung-Chieh;LIU, Zheng;ZHANG, Xiaoxiang;CHEN, Xi;LIU, Mingxuan |
分类号 |
H01L21/77;G02F1/1362;H01L27/12 |
主分类号 |
H01L21/77 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|