发明名称 ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF, DISPLAY PANEL AND MASK PLATE
摘要 Provided are a manufacturing method of an array substrate, an array substrate manufactured thereby, a display panel comprising the array substrate and a mask plate. The manufacturing method of the array substrate comprises: providing a mask plate (10) comprising a transparent substrate (101), a semi-transparent region (102) formed on the transparent substrate (101), an opaque region (103) formed on the semi-transparent region (102), and a fully transparent region (104) excluding the semi-transparent region (102) and the opaque region (103); using the opaque region (103) of the mask plate (10) to form a first mask pattern (5001) on a base substrate (501); and using the semi-transparent region (102)and the opaque region (103) of the mask plate (10) to form a second mask pattern (5002) on the base substrate (501) with the first mask pattern (5001) formed thereon.
申请公布号 WO2016183968(A1) 申请公布日期 2016.11.24
申请号 WO2015CN89363 申请日期 2015.09.10
申请人 BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. 发明人 ZHANG, Zhichao;KUO, Tsung-Chieh;LIU, Zheng;ZHANG, Xiaoxiang;CHEN, Xi;LIU, Mingxuan
分类号 H01L21/77;G02F1/1362;H01L27/12 主分类号 H01L21/77
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