发明名称 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM
摘要 According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
申请公布号 WO2009004987(A1) 申请公布日期 2009.01.08
申请号 WO2008JP61682 申请日期 2008.06.20
申请人 KABUSHIKI KAISHA TOSHIBA;KIMURA, KAORI;KAMATA, YOSHIYUKI;SHIROTORI, SATOSHI;SAKURAI, MASATOSHI 发明人 KIMURA, KAORI;KAMATA, YOSHIYUKI;SHIROTORI, SATOSHI;SAKURAI, MASATOSHI
分类号 G11B5/84;G11B5/65 主分类号 G11B5/84
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