| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a water-quality evaluation method which enables the precise evaluation of the quality of water to be evaluated, and to provide a substrate contact device used for the same. <P>SOLUTION: The substrate contact device 10 has a sealing performance that can maintain its inside to a vacuum level of -0.094 MPa or higher. A substrate W is housed in the substrate contact device 10, and water to be evaluated is passed. After the termination of water passage, the inside of the substrate contact device 10 is sealed, and the substrate contact device 10 is transferred to analysis facilities, while the substrate W is housed in the substrate contact device 10 as is. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
