发明名称 |
Gaspaneel |
摘要 |
<p>A manifold system for enabling a distribution of fluids comprising a plurality of individual manifold blocks (1600), each manifold block having a single fluid passageway with an entrance port (1634) and an exit port (1636) accessing only a common surface; and means (1950-1956) for removably interlocking a pair of adjacent manifold blocks to each other to operatively permit their respective fluid passageways to be positioned for interconnection.</p> |
申请公布号 |
DE69839083(D1) |
申请公布日期 |
2008.03.20 |
申请号 |
DE1998639083 |
申请日期 |
1998.10.28 |
申请人 |
CELERITY INC. |
发明人 |
REDEMANN, ERIC J;VU, KIM N |
分类号 |
F16K27/00;C23C16/44;C23C16/455;F16K11/10;F16K11/20;F16K11/22;F16K51/00;F16L41/03;H01J37/32;H01L21/00;H01L21/304 |
主分类号 |
F16K27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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