| 摘要 |
PROBLEM TO BE SOLVED: To block transfer of energy to a gas supplied via an apparatus by arranging a feedthrough between a grounded gas entrance manifold and a biased gas exit manifold, so that the energy is blocked from being transferred to the gas. SOLUTION: A gas feedthrough 20, made from static discharging plastic, extends between a grounded gas entrance manifold 14 and an RF hot gas exit manifold 16. The ends of a pair of gas lines 24 are arranged at recesses of channels formed on both manifolds 14 and 16. The lines 24 made of quartz or an analogous material are preferably arranged within the feedthrough 20 located between the manifolds 14 and 16, to thereby block the formation of a plasma within the lines 24. Since the resistance of the feedthrough 20 formed of a static dissipating composite material is lower than the resistance of the gas supplied through the lines 24, energy applied to the manifold 16 will not be transferred to the gas.
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