| 摘要 |
An interferometer system for tracking a position of a movable object in a pattern generator is provided. The interferometer system includes an interferometer configured to generate an interference signal indicative of at least one instantaneous position of an object, and a control system. The control system generates raw position data based on the generated interference signal, selects a subset of position data from the raw position data, and extrapolates at least a third position of the object based on the selected subset of position data.
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