发明名称 LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
摘要 An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.
申请公布号 US2016357012(A1) 申请公布日期 2016.12.08
申请号 US201615243397 申请日期 2016.08.22
申请人 Carl Zeiss SMT GmbH 发明人 SOYEZ Guido;BACK Stephan;BUECHELE Joachim;KALLER Julian;LIMBACH Guido;WOELFLE Harald
分类号 G02B27/00;G03F7/20;G02B7/14 主分类号 G02B27/00
代理机构 代理人
主权项 1. A lens module, comprising: a lens housing; at least one optical element; a gas stream source; and at least one gas seal, wherein the lens housing and the optical element are configured to arrange the optical element selectively in the lens housing or entirely outside the lens housing, and wherein the lens housing has an inner space including a region of the optical element and a remaining inner space of the lens housing separated from the region of the optical element by the at least one gas seal.
地址 Oberkochen DE