发明名称 BATCH TYPE INLINE HEAT TREATMENT APPARATUS
摘要 In the present invention, disclosed is a batch type inline heat treatment apparatus which reduces a particle generated when a glass substrate is transferred in a heat treatment process of the glass substrate, and can reduces the number of process chambers and an installation area. The batch type inline heat treatment apparatus is formed by including the process chamber which gradationally transfers at least two sequentially inserted glass substrates in a longitudinal direction, and processes the glass substrates with heat to discharge.
申请公布号 KR20160079389(A) 申请公布日期 2016.07.06
申请号 KR20140190670 申请日期 2014.12.26
申请人 VIATRON TECHNOLOGIES INC. 发明人 KIM, BYUNG KUK;KIM, HYUN SOO;KWON, OH CHUL
分类号 H01L21/324;H01L21/677 主分类号 H01L21/324
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